Title:Recent Progress on Critical Cleaning of Sapphire Single-Crystal Substrates: A Mini-Review
Volume: 6
Issue: 3
Author(s): Dan Zhang and Yang Gan
Affiliation:
Keywords:
Contamination control, Sapphire, Surface chemistry, Surface structure, UV/plasma cleaning methods, Wetchemical
cleaning methods.
Abstract: Sapphire single-crystals are one of the industrial favorite substrates for GaN film deposition and LED application
as well as a model system for oxides’ aqueous interfacial chemistry studies. Contamination control of sapphire substrates
is critical to the device fabrication and experimental studies of interfacial properties. Here we reviewed various
methods reported in the literature including conventional and new wet-chemical methods, and UV/plasma methods. Special
attentions were paid to their cleaning performance in terms of reliably removing organic/particulate/heavy metallic
contaminants.
