Pearson IV is one function among Pearson function family, where various
Pearson functions exist. Each Pearson function is characterized by its related γ2 β plane. The moments of real profiles frequently deviate from the plane for the Pearson IV
function. Therefore, we need to extend the function to whole Pearson function family. We
described the detail derivation of the functions.
Keywords: Ion implantation, Pearson, Pearson function family, Pearson I,
Pearson II, Pearson III, Pearson IV, Pearson V, Pearson VI, Pearson VII,
skeweness, kurtosis, moment, projected rage.
